Catalyst-referred etching of silicon
نویسندگان
چکیده
منابع مشابه
Alkaline Etching of Silicon
Alkaline etching of crystalline using KOH (potassium hydroxide), TMAH (tetramethyl ammonium hydroxide), or EDP (ethylenediamene pyrocatecol) is performed for creating various feature definition in MEMS (micro electrical mechanical structures, solar cells, and integrated circuit manufacturing. KOH will be discussed in this section. The alkaline chemistries have the ability to preferentially etch...
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ژورنال
عنوان ژورنال: Science and Technology of Advanced Materials
سال: 2007
ISSN: 1468-6996,1878-5514
DOI: 10.1016/j.stam.2006.12.004